Smith, Douglas L. (1991) Deposit Insurance. Engineering and Science, 54 (2). pp. 21-27. ISSN 0013-7812 https://resolver.caltech.edu/CaltechES:54.2.Deposit
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Abstract
The layers that make up a computer chip are deposited inside a sealed chamber. A new way to see what's going on within the chamber can improve chip quality.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | Computers |
| Record Number: | CaltechES:54.2.Deposit |
| Persistent URL: | https://resolver.caltech.edu/CaltechES:54.2.Deposit |
| Parent URL: | http://resolver.caltech.edu/CaltechES:54.2.0 |
| Usage Policy: | You are granted permission for individual, educational, research and non-commercial reproduction, distribution, display and performance of this work in any format. |
| Item Category: | All Records > Feature Articles |
| ID Code: | 3666 |
| Deposited By: | INVALID USER |
| Deposited On: | 26 Dec 2012 05:27 |
| Last Modified: | 04 Oct 2019 15:18 |
