Deposit Insurance
Author: Smith, Douglas L.
Published in: Engineering and Science, Volume 54, Number 2, 1991, pp. 21-27
Part of: Engineering and Science, Volume 54:2, Winter 1991
Item Category: Feature Articles
Persistent URL: https://resolver.caltech.edu/CaltechES:54.2.Deposit
Abstract
The layers that make up a computer chip are deposited inside a sealed chamber. A new way to see what's going on within the chamber can improve chip quality.
Files
- Deposit.pdf (application/pdf)